The technique can be used in line profiling of the elemental composition across the surface, or in depth profiling when paired with ion-beam etching. XPS is a powerful measurement technique because it not only shows what elements are present, but also what other elements they are bonded to. X-ray photoelectron spectroscopy ( XPS) is a surface-sensitive quantitative spectroscopic technique based on the photoelectric effect that can identify the elements that exist within a material (elemental composition) or are covering its surface, as well as their chemical state, and the overall electronic structure and density of the electronic states in the material. Basic components of a monochromatic XPS system.
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